Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
American Institute of Physics
Not yet evaluated
About the journal
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is a journal published by American Institute of Physics in United States. It is listed in PUBMED according to the sources read. Facts are reproduced as recorded at their sources with their capture dates; PublishLens indicators are available after sign-in.
Basic facts
- Publisher
- American Institute of Physics
- ISSN
- 1071-1023 · 1520-8567
- Country
- United States
- Access
- Not open access / not declared
Index listings
- PUBMED · 2008-11-01
- Indexing
- PUBMED
- APC
- —
- Declared review time (DOAJ)
- —
- Activity (OpenAlex)
- Dormant — no works recorded since 2015
- PublishLens list status
- Shown after sign-in
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Methodology signals (dated facts from their sources)
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Descriptive metadata from public sources (DOAJ, OpenAlex, PubMed) as of the capture date shown — contains no assessment or judgment.
Works in OpenAlex
11784
Last recorded publication year
2015
Reported by OpenAlex in 1 of 3 sources (CC0 flags, not verified indexing)DOAJSciELOOpenAlex Core
h-index
141
i10-index
6122
From OpenAlex open data (CC0).
Editorial & policy4
- Observed digital preservation (Keepers registry)— snapshot 2026-10-05
- CLOCKSSPortico
- Norwegian register (HK-dir)— 2009
- Level 1 — approved scholarly channel
- Open references deposited at Crossref
- 0%
- ORCID iDs in current deposits
- 0%
Identity & continuity3
- Alternate titles
- JVST BJournal of vacuum science and technology.Journal of vacuum science & technology.Microelectronics and nanometer structures$I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology.
- Source type
- journal
- NLM unique ID (PubMed)
- 101491911
Classification(no data)
No data available to the platform for this group
No platform data for: Classification — absence is not a judgment about the journal.
Subject areas
- Semiconductor materials and devices
- Semiconductor materials and devices
- Advancements in Photolithography Techniques
- Semiconductor materials and devices
- Semiconductor materials and interfaces
- Advancements in Photolithography Techniques
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
Show all subjects (75)
- Semiconductor Quantum Structures and Devices
- Semiconductor Quantum Structures and Devices
- Integrated Circuits and Semiconductor Failure Analysis
- Integrated Circuits and Semiconductor Failure Analysis
- Electron and X-Ray Spectroscopy Techniques
- Electron and X-Ray Spectroscopy Techniques
- Force Microscopy Techniques and Applications
- Force Microscopy Techniques and Applications
- Plasma Diagnostics and Applications
- Semiconductor Quantum Structures and Devices
- Photocathodes and Microchannel Plates
- Electron and X-Ray Spectroscopy Techniques
- Ion-surface interactions and analysis
- Metal and Thin Film Mechanics
- Metal and Thin Film Mechanics
- Surface and Thin Film Phenomena
- Copper Interconnects and Reliability
- Gyrotron and Vacuum Electronics Research
- Ion-surface interactions and analysis
- Ion-surface interactions and analysis
- Surface and Thin Film Phenomena
- Surface and Thin Film Phenomena
- Semiconductor materials and interfaces
- Semiconductor materials and interfaces
- Force Microscopy Techniques and Applications
- Nanofabrication and Lithography Techniques
- Nanofabrication and Lithography Techniques
- Advancements in Semiconductor Devices and Circuit Design
- GaN-based semiconductor devices and materials
- GaN-based semiconductor devices and materials
- Advancements in Semiconductor Devices and Circuit Design
- Advancements in Semiconductor Devices and Circuit Design
- Plasma Diagnostics and Applications
- Plasma Diagnostics and Applications
- Copper Interconnects and Reliability
- Copper Interconnects and Reliability
- Diamond and Carbon-based Materials Research
- Diamond and Carbon-based Materials Research
- Advanced Surface Polishing Techniques
- Advanced Surface Polishing Techniques
- Nanowire Synthesis and Applications
- Nanowire Synthesis and Applications
- GaN-based semiconductor devices and materials
- Advanced Semiconductor Detectors and Materials
- Advanced Semiconductor Detectors and Materials
- Advanced MEMS and NEMS Technologies
- Optical Coatings and Gratings
- Optical Coatings and Gratings
- Advanced X-ray Imaging Techniques
- Silicon Nanostructures and Photoluminescence
- Silicon Nanostructures and Photoluminescence
- solar cell performance optimization
- Carbon Nanotubes in Composites
- Carbon Nanotubes in Composites
- Molecular Junctions and Nanostructures
- Molecular Junctions and Nanostructures
- Advanced Semiconductor Detectors and Materials
- Photonic and Optical Devices
- Photonic and Optical Devices
- Block Copolymer Self-Assembly
- Silicon and Solar Cell Technologies
- Silicon and Solar Cell Technologies
- Surface Chemistry and Catalysis
- Advanced optical system design
- Semiconductor Lasers and Optical Devices
- Silicon Carbide Semiconductor Technologies
- Vacuum and Plasma Arcs
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The journal's record in other sources:Web of Science MJLDOAJ